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Tuning the Electrical and Thermoelectric Properties of N Ion Implanted SrTiO(3) Thin Films and Their Conduction Mechanisms
The SrTiO(3) thin films were fabricated by pulsed laser deposition. Subsequently ion implantation with 60 keV N ions at two different fluences 1 × 10(16) and 5 × 10(16) ions/cm(2) and followed by annealing was carried out. Thin films were then characterized for electronic structure, morphology and t...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6785559/ https://www.ncbi.nlm.nih.gov/pubmed/31597931 http://dx.doi.org/10.1038/s41598-019-51079-y |