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Mass Sensing for the Advanced Fabrication of Nanomechanical Resonators
[Image: see text] We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed t...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2019
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6788197/ https://www.ncbi.nlm.nih.gov/pubmed/31478676 http://dx.doi.org/10.1021/acs.nanolett.9b02351 |