Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

[Image: see text] Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing pie...

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Detalles Bibliográficos
Autores principales: Fan, Xuge, Forsberg, Fredrik, Smith, Anderson D., Schröder, Stephan, Wagner, Stefan, Östling, Mikael, Lemme, Max C., Niklaus, Frank
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2019
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6791286/
https://www.ncbi.nlm.nih.gov/pubmed/31478660
http://dx.doi.org/10.1021/acs.nanolett.9b01759

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6791286/
https://www.ncbi.nlm.nih.gov/pubmed/31478660
http://dx.doi.org/10.1021/acs.nanolett.9b01759

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