Localized Mechanical Actuation using pn Junctions

We are reporting on the fabrication and characterization of microscale electromechanical actuators driven by the internal forces induced within the depletion region of a typical pn junction. Depletion region actuators operate based on the modulation of the interactions of the internal electric field...

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Detalles Bibliográficos
Autores principales: Kanygin, Mikhail, Joy, Abbin Perunnilathil, Bahreyni, Behraad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6795996/
https://www.ncbi.nlm.nih.gov/pubmed/31619696
http://dx.doi.org/10.1038/s41598-019-49988-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6795996/
https://www.ncbi.nlm.nih.gov/pubmed/31619696
http://dx.doi.org/10.1038/s41598-019-49988-z

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