Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The abilit...

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Detalles Bibliográficos
Autores principales: Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6799830/
https://www.ncbi.nlm.nih.gov/pubmed/31636932
http://dx.doi.org/10.1038/s41378-019-0095-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6799830/
https://www.ncbi.nlm.nih.gov/pubmed/31636932
http://dx.doi.org/10.1038/s41378-019-0095-9

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