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Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The abilit...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6799830/ https://www.ncbi.nlm.nih.gov/pubmed/31636932 http://dx.doi.org/10.1038/s41378-019-0095-9 |