Structural and Optical Characterization of ZnS Ultrathin Films Prepared by Low-Temperature ALD from Diethylzinc and 1.5-Pentanedithiol after Various Annealing Treatments

The structural and optical evolution of the ZnS thin films prepared by atomic layer deposition (ALD) from the diethylzinc (DEZ) and 1,5-pentanedithiol (PDT) as zinc and sulfur precursors was studied. A deposited ZnS layer (of about 60 nm) is amorphous, with a significant S excess. After annealing, t...

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Detalles Bibliográficos
Autores principales: Włodarski, Maksymilian, Chodorow, Urszula, Jóźwiak, Stanisław, Putkonen, Matti, Durejko, Tomasz, Sajavaara, Timo, Norek, Małgorzata
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6804116/
https://www.ncbi.nlm.nih.gov/pubmed/31575000
http://dx.doi.org/10.3390/ma12193212

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6804116/
https://www.ncbi.nlm.nih.gov/pubmed/31575000
http://dx.doi.org/10.3390/ma12193212

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