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On-Chip Non-Dispersive Infrared CO(2) Sensor Based on an Integrating Cylinder †
In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO(2) sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simu...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806095/ https://www.ncbi.nlm.nih.gov/pubmed/31575053 http://dx.doi.org/10.3390/s19194260 |