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A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones
Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on” applications increasingly requires a low power consumptio...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806232/ https://www.ncbi.nlm.nih.gov/pubmed/31554194 http://dx.doi.org/10.3390/s19194126 |