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A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones

Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on” applications increasingly requires a low power consumptio...

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Detalles Bibliográficos
Autores principales:	Quintero, Andres, Cardes, Fernando, Perez, Carlos, Buffa, Cesare, Wiesbauer, Andreas, Hernandez, Luis
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6806232/ https://www.ncbi.nlm.nih.gov/pubmed/31554194 http://dx.doi.org/10.3390/s19194126

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