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Nanoscale structural defects in oblique Ar(+) sputtered Si(111) surfaces
The present endeavor investigates the controlled surface modifications and evolution of self-assembled nano-dimensional defects on oblique Ar(+) sputtered Si(111) surfaces which are important substrates for surface reconstruction. The defect formation started at off-normal incidences of 50° and then...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6820563/ https://www.ncbi.nlm.nih.gov/pubmed/31664136 http://dx.doi.org/10.1038/s41598-019-52099-4 |