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Nanoscale structural defects in oblique Ar(+) sputtered Si(111) surfaces

The present endeavor investigates the controlled surface modifications and evolution of self-assembled nano-dimensional defects on oblique Ar(+) sputtered Si(111) surfaces which are important substrates for surface reconstruction. The defect formation started at off-normal incidences of 50° and then...

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Detalles Bibliográficos
Autores principales: Gupta, Divya, Chawla, Mahak, Singhal, Rahul, Aggarwal, Sanjeev
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6820563/
https://www.ncbi.nlm.nih.gov/pubmed/31664136
http://dx.doi.org/10.1038/s41598-019-52099-4

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