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Nanoscale structural defects in oblique Ar(+) sputtered Si(111) surfaces
The present endeavor investigates the controlled surface modifications and evolution of self-assembled nano-dimensional defects on oblique Ar(+) sputtered Si(111) surfaces which are important substrates for surface reconstruction. The defect formation started at off-normal incidences of 50° and then...
Autores principales: | Gupta, Divya, Chawla, Mahak, Singhal, Rahul, Aggarwal, Sanjeev |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6820563/ https://www.ncbi.nlm.nih.gov/pubmed/31664136 http://dx.doi.org/10.1038/s41598-019-52099-4 |
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