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Aluminium incorporation in polar, semi- and non-polar AlGaN layers: a comparative study of x-ray diffraction and optical properties
Growth of Al(x)Ga(1−x)N layers (0 ≤ x ≤ 1) simultaneously on polar (0001), semipolar ([Formula: see text] 3) and ([Formula: see text] ), as well as nonpolar ([Formula: see text] ) and ([Formula: see text] ) AlN templates, which were grown on planar sapphire substrates, has been investigated by metal...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6825158/ https://www.ncbi.nlm.nih.gov/pubmed/31676798 http://dx.doi.org/10.1038/s41598-019-52067-y |