Application-Specific Oxide-Based and Metal–Dielectric Thin-Film Materials Prepared by Radio Frequency Magnetron Sputtering

We report on the development of several different thin-film functional material systems prepared by radio frequency (RF) magnetron sputtering at Edith Cowan University nanofabrication labs. While focusing on the RF sputtering process optimizations for new or the previously underexplored material com...

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Detalles Bibliográficos
Autores principales: Nur-E-Alam, Mohammad, Lonsdale, Wade, Vasiliev, Mikhail, Alameh, Kamal
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6829262/
https://www.ncbi.nlm.nih.gov/pubmed/31640298
http://dx.doi.org/10.3390/ma12203448

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6829262/
https://www.ncbi.nlm.nih.gov/pubmed/31640298
http://dx.doi.org/10.3390/ma12203448

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