Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform

Nanomechanical characterization of vertically aligned micro- and nanopillars plays an important role in quality control of pillar-based sensors and devices. A microelectromechanical system based scanning probe microscope (MEMS-SPM) has been developed for quantitative measurement of the bending stiff...

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Detalles Bibliográficos
Autores principales: Li, Zhi, Gao, Sai, Brand, Uwe, Hiller, Karla, Hahn, Susann, Hamdana, Gerry, Peiner, Erwin, Wolff, Helmut, Bergmann, Detlef
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6832273/
https://www.ncbi.nlm.nih.gov/pubmed/31635250
http://dx.doi.org/10.3390/s19204529

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6832273/
https://www.ncbi.nlm.nih.gov/pubmed/31635250
http://dx.doi.org/10.3390/s19204529

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