Real-Time Correction and Stabilization of Laser Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano Positioning Stage Metrology

A low-cost miniature homodyne interferometer (MHI) with self-wavelength correction and self-wavelength stabilization is proposed for long-stroke micro/nano positioning stage metrology. In this interferometer, the displacement measurement is based on the analysis of homodyne interferometer fringe pat...

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Detalles Bibliográficos
Autores principales: Cai, Yindi, Feng, Baokai, Sang, Qi, Fan, Kuang-Chao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6832479/
https://www.ncbi.nlm.nih.gov/pubmed/31652550
http://dx.doi.org/10.3390/s19204587

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6832479/
https://www.ncbi.nlm.nih.gov/pubmed/31652550
http://dx.doi.org/10.3390/s19204587

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