Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing

This paper presents a comprehensive modeling and experimental verification of active piezoresistive atomic force microscopy (AFM) cantilevers, which are the technology enabling high-resolution and high-speed surface measurements. The mechanical structure of the cantilevers integrating Wheatstone pie...

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Detalles Bibliográficos
Autores principales: Kunicki, Piotr, Angelov, Tihomir, Ivanov, Tzvetan, Gotszalk, Teodor, Rangelow, Ivo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6832718/
https://www.ncbi.nlm.nih.gov/pubmed/31614863
http://dx.doi.org/10.3390/s19204429

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6832718/
https://www.ncbi.nlm.nih.gov/pubmed/31614863
http://dx.doi.org/10.3390/s19204429

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