Analysis of the Performance Variation Mechanism of MEMS Suspended Inductors under Mechanical Shock

Micro-electromechanical system (MEMS) suspended inductors have been widely studied in recent decades because of their excellent radio frequency performance. However, the deformation of the inductor coil and the performance variation usually occur to the MEMS suspended inductors when the inductors ar...

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Detalles Bibliográficos
Autores principales: Li, Yiyuan, Xu, Lixin, Li, Jianhua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843292/
https://www.ncbi.nlm.nih.gov/pubmed/31614649
http://dx.doi.org/10.3390/mi10100686

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843292/
https://www.ncbi.nlm.nih.gov/pubmed/31614649
http://dx.doi.org/10.3390/mi10100686

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