A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films

Various multilayered thin films are extensively used as the basic component of some micro-electro-mechanical systems, requiring an efficient measurement method for material parameters, such as Young’s modulus, residual stress, etc. This paper developed a novel measurement method to extract the Young...

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Detalles Bibliográficos
Autores principales: Zhou, Zai-Fa, Meng, Mu-Zi, Sun, Chao, Huang, Qing-An
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843387/
https://www.ncbi.nlm.nih.gov/pubmed/31581644
http://dx.doi.org/10.3390/mi10100669

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843387/
https://www.ncbi.nlm.nih.gov/pubmed/31581644
http://dx.doi.org/10.3390/mi10100669

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