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A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films

Various multilayered thin films are extensively used as the basic component of some micro-electro-mechanical systems, requiring an efficient measurement method for material parameters, such as Young’s modulus, residual stress, etc. This paper developed a novel measurement method to extract the Young...

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Autores principales: Zhou, Zai-Fa, Meng, Mu-Zi, Sun, Chao, Huang, Qing-An
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843387/
https://www.ncbi.nlm.nih.gov/pubmed/31581644
http://dx.doi.org/10.3390/mi10100669
_version_ 1783468203246092288
author Zhou, Zai-Fa
Meng, Mu-Zi
Sun, Chao
Huang, Qing-An
author_facet Zhou, Zai-Fa
Meng, Mu-Zi
Sun, Chao
Huang, Qing-An
author_sort Zhou, Zai-Fa
collection PubMed
description Various multilayered thin films are extensively used as the basic component of some micro-electro-mechanical systems, requiring an efficient measurement method for material parameters, such as Young’s modulus, residual stress, etc. This paper developed a novel measurement method to extract the Young’s moduli and residual stresses for individual layers in multilayered thin films, based on the first resonance frequency measurements of both cantilever beams and doubly-clamped beams. The fabrication process of the test structure, the corresponding modeling and the material parameter extraction process are introduced. To verify this method, the test structures with gold/polysilicon bilayer beams are fabricated and tested. The obtained Young’s moduli of polysilicon films are from 151.38 GPa to 154.93 GPa, and the obtained Young’s moduli of gold films are from 70.72 GPa to 75.34 GPa. The obtained residual stresses of polysilicon films are from −14.86 MPa to −13.11 MPa (compressive stress), and the obtained residual stresses of gold films are from 16.27 to 23.95 MPa (tensile stress). The extracted parameters are within the reasonable ranges, compared with the available results or the results obtained by other test methods.
format Online
Article
Text
id pubmed-6843387
institution National Center for Biotechnology Information
language English
publishDate 2019
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-68433872019-11-25 A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films Zhou, Zai-Fa Meng, Mu-Zi Sun, Chao Huang, Qing-An Micromachines (Basel) Article Various multilayered thin films are extensively used as the basic component of some micro-electro-mechanical systems, requiring an efficient measurement method for material parameters, such as Young’s modulus, residual stress, etc. This paper developed a novel measurement method to extract the Young’s moduli and residual stresses for individual layers in multilayered thin films, based on the first resonance frequency measurements of both cantilever beams and doubly-clamped beams. The fabrication process of the test structure, the corresponding modeling and the material parameter extraction process are introduced. To verify this method, the test structures with gold/polysilicon bilayer beams are fabricated and tested. The obtained Young’s moduli of polysilicon films are from 151.38 GPa to 154.93 GPa, and the obtained Young’s moduli of gold films are from 70.72 GPa to 75.34 GPa. The obtained residual stresses of polysilicon films are from −14.86 MPa to −13.11 MPa (compressive stress), and the obtained residual stresses of gold films are from 16.27 to 23.95 MPa (tensile stress). The extracted parameters are within the reasonable ranges, compared with the available results or the results obtained by other test methods. MDPI 2019-10-02 /pmc/articles/PMC6843387/ /pubmed/31581644 http://dx.doi.org/10.3390/mi10100669 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhou, Zai-Fa
Meng, Mu-Zi
Sun, Chao
Huang, Qing-An
A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films
title A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films
title_full A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films
title_fullStr A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films
title_full_unstemmed A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films
title_short A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films
title_sort novel measurement method of mechanical properties for individual layers in multilayered thin films
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843387/
https://www.ncbi.nlm.nih.gov/pubmed/31581644
http://dx.doi.org/10.3390/mi10100669
work_keys_str_mv AT zhouzaifa anovelmeasurementmethodofmechanicalpropertiesforindividuallayersinmultilayeredthinfilms
AT mengmuzi anovelmeasurementmethodofmechanicalpropertiesforindividuallayersinmultilayeredthinfilms
AT sunchao anovelmeasurementmethodofmechanicalpropertiesforindividuallayersinmultilayeredthinfilms
AT huangqingan anovelmeasurementmethodofmechanicalpropertiesforindividuallayersinmultilayeredthinfilms
AT zhouzaifa novelmeasurementmethodofmechanicalpropertiesforindividuallayersinmultilayeredthinfilms
AT mengmuzi novelmeasurementmethodofmechanicalpropertiesforindividuallayersinmultilayeredthinfilms
AT sunchao novelmeasurementmethodofmechanicalpropertiesforindividuallayersinmultilayeredthinfilms
AT huangqingan novelmeasurementmethodofmechanicalpropertiesforindividuallayersinmultilayeredthinfilms