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A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films
Various multilayered thin films are extensively used as the basic component of some micro-electro-mechanical systems, requiring an efficient measurement method for material parameters, such as Young’s modulus, residual stress, etc. This paper developed a novel measurement method to extract the Young...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843387/ https://www.ncbi.nlm.nih.gov/pubmed/31581644 http://dx.doi.org/10.3390/mi10100669 |