Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO(2) Bimorphs

Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose...

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Detalles Bibliográficos
Autores principales: Wang, Peng, Liu, YaBing, Wang, Donglin, Liu, Huan, Liu, Weiguo, Xie, HuiKai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843648/
https://www.ncbi.nlm.nih.gov/pubmed/31614853
http://dx.doi.org/10.3390/mi10100693

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843648/
https://www.ncbi.nlm.nih.gov/pubmed/31614853
http://dx.doi.org/10.3390/mi10100693

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