Cargando…
Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO(2) Bimorphs
Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843648/ https://www.ncbi.nlm.nih.gov/pubmed/31614853 http://dx.doi.org/10.3390/mi10100693 |