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A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes

Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper prese...

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Detalles Bibliográficos
Autores principales: Lu, Kun, Xi, Xiang, Xiao, Dingbang, Shi, Yan, Zhuo, Ming, Wu, Xuezhong, Wu, Yulie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6843831/
https://www.ncbi.nlm.nih.gov/pubmed/31614880
http://dx.doi.org/10.3390/mi10100695