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Comparison of Achievable Contrast Features in Computed Tomography Observing the Growth of a 4H-SiC Bulk Crystal

Today the physical vapor transport process is regularly applied for the growth of bulk SiC crystals. Due to the required high temperature of up to 2400 °C, and low gas pressure of several Mbar inside the crucible, the systems are encapsulated by several layers for heating, cooling and isolation inhi...

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Detalles Bibliográficos
Autores principales: Salamon, Michael, Arzig, Matthias, Wellmann, Peter J., Uhlmann, Norman
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6888065/
https://www.ncbi.nlm.nih.gov/pubmed/31698806
http://dx.doi.org/10.3390/ma12223652