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Influence of Carrier Gases on the Quality of Epitaxial Corundum-Structured α-Ga(2)O(3) Films Grown by Mist Chemical Vapor Deposition Method
This report systematically investigates the influence of different carrier gases (O(2), N(2), and air) on the growth of gallium oxide (Ga(2)O(3)) thin films on c-plane sapphire substrates by using the mist-CVD method. Although XRD and Raman measurements show that the pure corundum-structured α-Ga(2)...
Autores principales: | Xu, Yu, Zhang, Chunfu, Cheng, Yaolin, Li, Zhe, Cheng, Ya’nan, Feng, Qian, Chen, Dazheng, Zhang, Jincheng, Hao, Yue |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6888560/ https://www.ncbi.nlm.nih.gov/pubmed/31703363 http://dx.doi.org/10.3390/ma12223670 |
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