Stress-controlled decomposition routes in cubic AlCrN films assessed by in-situ high-temperature high-energy grazing incidence transmission X-ray diffraction

The dependence of decomposition routes on intrinsic microstructure and stress in nanocrystalline transition metal nitrides is not yet fully understood. In this contribution, three Al(0.7)Cr(0.3)N thin films with residual stress magnitudes of −3510, −4660 and −5930 MPa in the as-deposited state were...

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Detalles Bibliográficos
Autores principales: Meindlhumer, M., Klima, S., Jäger, N., Stark, A., Hruby, H., Mitterer, C., Keckes, J., Daniel, R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6888894/
https://www.ncbi.nlm.nih.gov/pubmed/31792305
http://dx.doi.org/10.1038/s41598-019-54307-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6888894/
https://www.ncbi.nlm.nih.gov/pubmed/31792305
http://dx.doi.org/10.1038/s41598-019-54307-7

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