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Stress-controlled decomposition routes in cubic AlCrN films assessed by in-situ high-temperature high-energy grazing incidence transmission X-ray diffraction
The dependence of decomposition routes on intrinsic microstructure and stress in nanocrystalline transition metal nitrides is not yet fully understood. In this contribution, three Al(0.7)Cr(0.3)N thin films with residual stress magnitudes of −3510, −4660 and −5930 MPa in the as-deposited state were...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6888894/ https://www.ncbi.nlm.nih.gov/pubmed/31792305 http://dx.doi.org/10.1038/s41598-019-54307-7 |