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A novel shaped-controlled fabrication of nanopore and its applications in quantum electronics

High-intensity (10(7)–10(8) A m(−2)) electron beams can be used to fabricate nanoscale pores. This approach enables real-time observation of nanopore drilling and precise control of the diameter of the nanopore. Nevertheless, it is not suitable for tuning the nanopore’s sidewall shape. In this study...

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Detalles Bibliográficos
Autores principales: Chen, Chien-Han, Chang, Xuyan, Wu, Cen-Shawn
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6901593/
https://www.ncbi.nlm.nih.gov/pubmed/31819125
http://dx.doi.org/10.1038/s41598-019-55190-y