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A novel shaped-controlled fabrication of nanopore and its applications in quantum electronics
High-intensity (10(7)–10(8) A m(−2)) electron beams can be used to fabricate nanoscale pores. This approach enables real-time observation of nanopore drilling and precise control of the diameter of the nanopore. Nevertheless, it is not suitable for tuning the nanopore’s sidewall shape. In this study...
Autores principales: | Chen, Chien-Han, Chang, Xuyan, Wu, Cen-Shawn |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6901593/ https://www.ncbi.nlm.nih.gov/pubmed/31819125 http://dx.doi.org/10.1038/s41598-019-55190-y |
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