Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Employing polymer cantilevers has shown to outperform using their silicon or silicon nitride analogues concerning the imaging speed of atomic force microscopy (AFM) in tapping mode (intermittent contact mode with amplitude modulation) by up to one order of magnitude. However, tips of the cantilever...

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Detalles Bibliográficos
Autores principales: Hosseini, Nahid, Neuenschwander, Matthias, Peric, Oliver, Andany, Santiago H, Adams, Jonathan D, Fantner, Georg E
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2019
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6902782/
https://www.ncbi.nlm.nih.gov/pubmed/31886112
http://dx.doi.org/10.3762/bjnano.10.226

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6902782/
https://www.ncbi.nlm.nih.gov/pubmed/31886112
http://dx.doi.org/10.3762/bjnano.10.226

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