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Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process
Employing polymer cantilevers has shown to outperform using their silicon or silicon nitride analogues concerning the imaging speed of atomic force microscopy (AFM) in tapping mode (intermittent contact mode with amplitude modulation) by up to one order of magnitude. However, tips of the cantilever...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6902782/ https://www.ncbi.nlm.nih.gov/pubmed/31886112 http://dx.doi.org/10.3762/bjnano.10.226 |