Monocrystalline Silicon Carbide Disk Resonators on Phononic Crystals with Ultra-Low Dissipation Bulk Acoustic Wave Modes

Micromechanical resonators with ultra-low energy dissipation are essential for a wide range of applications, such as navigation in GPS-denied environments. Routinely implemented in silicon (Si), their energy dissipation often reaches the quantum limits of Si, which can be surpassed by using material...

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Detalles Bibliográficos
Autores principales: Hamelin, Benoit, Yang, Jeremy, Daruwalla, Anosh, Wen, Haoran, Ayazi, Farrokh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6904713/
https://www.ncbi.nlm.nih.gov/pubmed/31822789
http://dx.doi.org/10.1038/s41598-019-54278-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6904713/
https://www.ncbi.nlm.nih.gov/pubmed/31822789
http://dx.doi.org/10.1038/s41598-019-54278-9

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