First principles investigation on energetics, structure, and mechanical properties of amorphous carbon films doped with B, N, and Cl

Amorphous carbon (a-C) films have received significant attention due to their reliable structures and superior mechanical, chemical and electronic properties, making them a strong candidate as a hard mask material. We investigated the energetics, structure, and electronic and mechanical properties o...

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Detalles Bibliográficos
Autores principales: Park, Hwanyeol, Woo, Daekwang, Lee, Jong Myeong, Park, Se Jun, Lee, Sungwoo, Kim, Ho Jun, Yoon, Euijoon, Lee, Gun-Do
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6908623/
https://www.ncbi.nlm.nih.gov/pubmed/31831828
http://dx.doi.org/10.1038/s41598-019-55488-x

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6908623/
https://www.ncbi.nlm.nih.gov/pubmed/31831828
http://dx.doi.org/10.1038/s41598-019-55488-x

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