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First principles investigation on energetics, structure, and mechanical properties of amorphous carbon films doped with B, N, and Cl
Amorphous carbon (a-C) films have received significant attention due to their reliable structures and superior mechanical, chemical and electronic properties, making them a strong candidate as a hard mask material. We investigated the energetics, structure, and electronic and mechanical properties o...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6908623/ https://www.ncbi.nlm.nih.gov/pubmed/31831828 http://dx.doi.org/10.1038/s41598-019-55488-x |