Spectral data of refractive index and extinction coefficient for thin films of titanium group metals used for fabrication of optical microstructures

In this data paper we share the information on refractive index and extinction coefficient of metallic films of the titanium group (Ti, Zr, Hf), measured by ellipsometry in the wavelength range of 300–1100 nm. The presented data can be used to indirectly measure the thickness of metal films when the...

Descripción completa

Detalles Bibliográficos
Autores principales: Belousov, Dmitrij A., Terent'ev, Vadim S., Spesivtsev, Evgeny V., Korolkov, Victor P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2019
Materias:
Materials Science
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6911987/
https://www.ncbi.nlm.nih.gov/pubmed/31853473
http://dx.doi.org/10.1016/j.dib.2019.104903

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6911987/
https://www.ncbi.nlm.nih.gov/pubmed/31853473
http://dx.doi.org/10.1016/j.dib.2019.104903

Ejemplares similares