Spectral data of refractive index and extinction coefficient for thin films of titanium group metals used for fabrication of optical microstructures

In this data paper we share the information on refractive index and extinction coefficient of metallic films of the titanium group (Ti, Zr, Hf), measured by ellipsometry in the wavelength range of 300–1100 nm. The presented data can be used to indirectly measure the thickness of metal films when they are sputtered onto a substrate, using the measured data on transmission and reflection coefficients depending on the wavelength of the probe beam, as well as to calculate the energy characteristics of diffraction gratings, formed on the surface of these films, under rigorous electromagnetic theory. The data were used in the research article “Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals” [1].