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Spectral data of refractive index and extinction coefficient for thin films of titanium group metals used for fabrication of optical microstructures
In this data paper we share the information on refractive index and extinction coefficient of metallic films of the titanium group (Ti, Zr, Hf), measured by ellipsometry in the wavelength range of 300–1100 nm. The presented data can be used to indirectly measure the thickness of metal films when the...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6911987/ https://www.ncbi.nlm.nih.gov/pubmed/31853473 http://dx.doi.org/10.1016/j.dib.2019.104903 |