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Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing
In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (<1 [Formula: see text] m) platforms, are highly relevant for nanoscale sensing. The presented top-down proced...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915366/ https://www.ncbi.nlm.nih.gov/pubmed/31653033 http://dx.doi.org/10.3390/mi10110718 |