STED Direct Laser Writing of 45 nm Width Nanowire

Controlled fabrication of 45 nm width nanowire using simulated emission depletion (STED) direct laser writing with a rod-shape effective focus spot is presented. In conventional STED direct laser writing, normally a donut-shaped depletion focus is used, and the minimum linewidth is restricted to 55...

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Detalles Bibliográficos
Autores principales: He, Xiaolong, Li, Tianlong, Zhang, Jia, Wang, Zhenlong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915467/
https://www.ncbi.nlm.nih.gov/pubmed/31661815
http://dx.doi.org/10.3390/mi10110726

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915467/
https://www.ncbi.nlm.nih.gov/pubmed/31661815
http://dx.doi.org/10.3390/mi10110726

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