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Effects of Embedded Helium on the Microstructure and Mechanical Properties of Erbium Films

A series of helium (He) charged nanograin-sized erbium (Er) films were deposited by direct current (DC)-magnetron sputtering with different He/Ar mixture gases. The microstructure and mechanical properties of He-charged Er films were investigated by X-ray diffraction (XRD), transmission electron mic...

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Detalles Bibliográficos
Autores principales: Fu, Wenbo, Shen, Huahai, Shi, Liqun, Zhou, Xiaosong, Long, Xinggui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915524/
https://www.ncbi.nlm.nih.gov/pubmed/31689988
http://dx.doi.org/10.3390/nano9111564