A Study on the Effects of Bottom Electrode Designs on Aluminum Nitride Contour-Mode Resonators

This study presents the effects of bottom electrode designs on the operation of laterally vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs were analyzed with varying bottom electrode areas at two resonant frequencies (f(0)) of about 230 MHz and 1.1 GHz. Specifical...

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Detalles Bibliográficos
Autores principales: Jung, Soon In, Ryu, Chaehyun, Piazza, Gianluca, Kim, Hoe Joon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915660/
https://www.ncbi.nlm.nih.gov/pubmed/31703310
http://dx.doi.org/10.3390/mi10110758

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915660/
https://www.ncbi.nlm.nih.gov/pubmed/31703310
http://dx.doi.org/10.3390/mi10110758

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