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A Study on the Effects of Bottom Electrode Designs on Aluminum Nitride Contour-Mode Resonators
This study presents the effects of bottom electrode designs on the operation of laterally vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs were analyzed with varying bottom electrode areas at two resonant frequencies (f(0)) of about 230 MHz and 1.1 GHz. Specifical...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915660/ https://www.ncbi.nlm.nih.gov/pubmed/31703310 http://dx.doi.org/10.3390/mi10110758 |