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Analysis and Simulation of Forcing the Limits of Thermal Sensing for Microbolometers in CMOS–MEMS Technology

Room-temperature highly sensitive microbolometers are becoming very attractive in infrared (IR) sensing with the increase in demand for the internet of things (IOT), night vision, and medical imaging. Different techniques, such as building extremely small-scale devices (nanotubes, etc.) or using 2D...

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Detalles Bibliográficos
Autores principales: Göktaş, Hasan, Gökhan, Fikri Serdar
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6915673/
https://www.ncbi.nlm.nih.gov/pubmed/31671784
http://dx.doi.org/10.3390/mi10110733