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Facile Process for Surface Passivation Using (NH(4))(2)S for the InP MOS Capacitor with ALD Al(2)O(3)
Ammonium sulfide ((NH(4))(2)S) was used for the passivation of an InP (100) substrate and its conditions were optimized. The capacitance–voltage (C–V) characteristics of InP metal-oxide-semiconductor (MOS) capacitors were analyzed by changing the concentration of and treatment time with (NH(4))(2)S....
Autores principales: | Lee, Jung Sub, Ahn, Tae Young, Kim, Daewon |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6926807/ https://www.ncbi.nlm.nih.gov/pubmed/31783497 http://dx.doi.org/10.3390/ma12233917 |
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