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Quantitative peel test for thin films/layers based on a coupled parametric and statistical study

The adhesion strength of thin films is critical to the durability of micro and nanofabricated devices. However, current testing methods are imprecise and do not produce quantitative results necessary for design specifications. The most common testing methods involve the manual application and remova...

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Detalles Bibliográficos
Autores principales: Rezaee, Maysam, Tsai, Li-Chih, Haider, Muhammad Istiaque, Yazdi, Armin, Sanatizadeh, Ehsan, Salowitz, Nathan P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6930293/
https://www.ncbi.nlm.nih.gov/pubmed/31874957
http://dx.doi.org/10.1038/s41598-019-55355-9