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Quantitative peel test for thin films/layers based on a coupled parametric and statistical study
The adhesion strength of thin films is critical to the durability of micro and nanofabricated devices. However, current testing methods are imprecise and do not produce quantitative results necessary for design specifications. The most common testing methods involve the manual application and remova...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6930293/ https://www.ncbi.nlm.nih.gov/pubmed/31874957 http://dx.doi.org/10.1038/s41598-019-55355-9 |