Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses

Although ultrafast laser materials processing has advanced at a breakneck pace over the last two decades, most applications have been developed with laser pulses at near-IR or visible wavelengths. Recent progress in mid-infrared (MIR) femtosecond laser source development may create novel capabilitie...

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Detalles Bibliográficos
Autores principales: Werner, Kevin, Gruzdev, Vitaly, Talisa, Noah, Kafka, Kyle, Austin, Drake, Liebig, Carl M., Chowdhury, Enam
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6934619/
https://www.ncbi.nlm.nih.gov/pubmed/31882675
http://dx.doi.org/10.1038/s41598-019-56384-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6934619/
https://www.ncbi.nlm.nih.gov/pubmed/31882675
http://dx.doi.org/10.1038/s41598-019-56384-0

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