A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion

Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechani...

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Detalles Bibliográficos
Autores principales: Gao, Xiangyu, Li, Zhanmiao, Wu, Jingen, Xin, Xudong, Shen, Xinyi, Yuan, Xiaoting, Yang, Jikun, Chu, Zhaoqiang, Dong, Shuxiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: AAAS 2019
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6946261/
https://www.ncbi.nlm.nih.gov/pubmed/31922139
http://dx.doi.org/10.34133/2019/8232097

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6946261/
https://www.ncbi.nlm.nih.gov/pubmed/31922139
http://dx.doi.org/10.34133/2019/8232097

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