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Highly Deep Ultraviolet–Transparent h-BN Film Deposited on an Al(0.7)Ga(0.3)N Template by Low-Temperature Radio-Frequency Sputtering
Hexagonal boron nitride (h-BN) is an attractive wide-bandgap material for application to emitters and detectors operating in the deep ultraviolet (DUV) spectral region. The optical transmittance of h-BN in the DUV region is particularly important for these devices. We report on the deposition of thi...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6947417/ https://www.ncbi.nlm.nih.gov/pubmed/31817335 http://dx.doi.org/10.3390/ma12244046 |